- JHA/HASP are developed
- Chemical and electrical hazards are studied
- The tool is locked out both mechanically and electrically
- Gases, ampoules and/or chemical delivery are disconnected
- Delivery and drain lines or exhaust systems are detached, cleaned and/or disposed
- Reservoirs and internal tool lines are drained, flushed, neutralized
- The equipment exterior, chambers, interior, etc. are cleaned with appropriate material
- The equipment is sampled and analyzed via field or laboratory analysis
- The access ports, lines or exhaust are capped and plugged
- A declaration of cleaning is completely filled out by both the ACT technician performing the work and a representative from the SEM client
- The tool is then rigged, packaged and shipped to its destination by the SEM client
A Brief History of ACTenviro’s Semiconductor Decon / Special Projects Group
- November 9, 2016
- By Marketing
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